Parts info
0010-03172 2MM PYROMETER RADIANCE CHAMBER
0010-56222 CERAMIC, DUAL ZONE HEATER
0020-08621 Reflector plate 200mm Radiance
0021-03721 HALOGEN RESISTANT XE REFLECTOR PLATE 200MM
0021-83463 RTP Vulcan (Gold sleeve)
0200-00705 EDGE RING,THIN,200MM
0200-03313 Lift Ring 120 Fixed Floating 300mm SE
714-045743-809 LINER, FIXED OUTR, ACME, 2300
715-042721-866 HI FLOW LINER CHAMBER LAM 2300
715-045710-821 DOOR, SYM CHMBR, ASSY, 2300 / LAM RESEARCH CORP
715-059638-803 CHAMBER TOP PC, LARGE WINDOW, LCLP